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SIMS Analyses of SiO~2/4H-SiC(0001) Interface
SIMS Analyses of SiO~2/4H-SiC(0001) Interface
SIMS Analyses of SiO~2/4H-SiC(0001) Interface
Yamashita, K. (author) / Kitabatake, M. (author) / Kusumoto, O. (author) / Takahashi, K. (author) / Uchida, M. (author) / Miyanaga, R. (author) / Itoh, H. (author) / Yoshikawa, M. (author)
MATERIALS SCIENCE FORUM ; 389/393 ; 1037-1040
2002-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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