AFM Studies of Platinum Silicide Thin Films on Silicon Grown by Pulsed Laser Deposition: Fid-Bau Portal

AFM Studies of Platinum Silicide Thin Films on Silicon Grown by Pulsed Laser Deposition

Li, M. / Zhao, L. / Cai, W. / Liu, D. / Chen, X.

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AFM Studies of Platinum Silicide Thin Films on Silicon Grown by Pulsed Laser Deposition

Li, M. / Zhao, L. / Cai, W. / Liu, D. / Chen, X.

AFM Studies of Platinum Silicide Thin Films on Silicon Grown by Pulsed Laser Deposition

Li, M. / Zhao, L. / Cai, W. / Liu, D. / Chen, X.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

AFM Studies of Platinum Silicide Thin Films on Silicon Grown by Pulsed Laser Deposition

Contributors:

Li, M. (author) / Zhao, L. (author) / Cai, W. (author) / Liu, D. (author) / Chen, X. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE AND TECHNOLOGY -SHENYANG- ; 18 ; 24-26

Publication date:

2002-01-01

Size:

3 pages

ISSN:

1005-0302

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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