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Electron interactions with plasma processing gases: present status and future needs
Electron interactions with plasma processing gases: present status and future needs
Electron interactions with plasma processing gases: present status and future needs
Christophorou, L. G. (author) / Olthoff, J. K. (author)
APPLIED SURFACE SCIENCE ; 192 ; 309-326
2002-01-01
18 pages
Article (Journal)
English
DDC:
621.35
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