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Multiphase structure of hydrogenated amorphous silicon carbide thin films
Multiphase structure of hydrogenated amorphous silicon carbide thin films
Multiphase structure of hydrogenated amorphous silicon carbide thin films
Wang, Y. H. (author) / Lin, J. (author) / Huan, C. H. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 95 ; 43 - 50
2002-01-01
8 pages
Article (Journal)
English
DDC:
620.11
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