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Texture Evolution in TiN, TaN and W~2N Thin Films

Kim, I. / Dost, S.

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Texture Evolution in TiN, TaN and W~2N Thin Films

Kim, I. / Dost, S.

Texture Evolution in TiN, TaN and W~2N Thin Films

Kim, I. / Dost, S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Texture Evolution in TiN, TaN and W~2N Thin Films

Contributors:

Kim, I. (author) / Dost, S. (author) / Lee, D. N.

Published in:

Textures of Materials ICOTOM 13 Part 2 ; 1591-1596

MATERIALS SCIENCE FORUM ; 408/412

Publication date:

2002-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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