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    Sol-Gel Processing of Oxide Gate Insulator from Trifluoroacetate Precursors

    New search for: Yamamoto, K.
    New search for: Fujihara, S.
    New search for: Kimura, T.

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    Sol-Gel Processing of Oxide Gate Insulator from Trifluoroacetate Precursors

    New search for: Yamamoto, K.
    New search for: Fujihara, S.
    New search for: Kimura, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Sol-Gel Processing of Oxide Gate Insulator from Trifluoroacetate Precursors

    New search for: Yamamoto, K.
    New search for: Fujihara, S.
    New search for: Kimura, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Sol-Gel Processing of Oxide Gate Insulator from Trifluoroacetate Precursors

    Contributors:

    Yamamoto, K. (author) / Fujihara, S. (author) / Kimura, T. (author)

    Published in:

    KEY ENGINEERING MATERIALS ; 259-262

    Publication date:

    2002-01-01

    Size:

    4 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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