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    Ultrafine and Well-Defined Patterns on Silicon Through Reaction Selectivity

    New search for: Prabhakaran, K.
    New search for: Hibino, H.
    New search for: Ogino, T.

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    Ultrafine and Well-Defined Patterns on Silicon Through Reaction Selectivity

    New search for: Prabhakaran, K.
    New search for: Hibino, H.
    New search for: Ogino, T.

    Access

    Access via TIB
    Check availability in my library
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    Ultrafine and Well-Defined Patterns on Silicon Through Reaction Selectivity

    New search for: Prabhakaran, K.
    New search for: Hibino, H.
    New search for: Ogino, T.

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Title:

    Ultrafine and Well-Defined Patterns on Silicon Through Reaction Selectivity

    Contributors:

    Prabhakaran, K. (author) / Hibino, H. (author) / Ogino, T. (author)

    Published in:

    ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 14 ; 1418-1421

    Publication date:

    2002-01-01

    Size:

    4 pages

    ISSN:

    0935-9648

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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