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Nanofabrication processes for single-ion implantation of silicon quantum computer devices
Nanofabrication processes for single-ion implantation of silicon quantum computer devices
Nanofabrication processes for single-ion implantation of silicon quantum computer devices
McKinnon, R. P. (author) / Stanley, F. E. (author) / Lumpkin, N. E. (author) / Gauja, E. (author) / Macks, L. D. (author) / Mitic, M. (author) / Chan, V. (author) / Peceros, K. (author) / Buehler, T. M. (author) / Dzurak, A. S. (author)
SMART MATERIALS AND STRUCTURES ; 11 ; 735-740
2002-01-01
6 pages
Article (Journal)
English
DDC:
530
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