In situ growing and etching of carbon nanotubes on silicon under microwave plasma: Fid-Bau Portal

In situ growing and etching of carbon nanotubes on silicon under microwave plasma

Tsai, S. H. / Shiu, C. T. / Lai, S. H. / Chan, L. H. / Hsieh, W. J. / Shih, H. C.

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In situ growing and etching of carbon nanotubes on silicon under microwave plasma

Tsai, S. H. / Shiu, C. T. / Lai, S. H. / Chan, L. H. / Hsieh, W. J. / Shih, H. C.

In situ growing and etching of carbon nanotubes on silicon under microwave plasma

Tsai, S. H. / Shiu, C. T. / Lai, S. H. / Chan, L. H. / Hsieh, W. J. / Shih, H. C.

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Document information

Title:

In situ growing and etching of carbon nanotubes on silicon under microwave plasma

Contributors:

Tsai, S. H. (author) / Shiu, C. T. (author) / Lai, S. H. (author) / Chan, L. H. (author) / Hsieh, W. J. (author) / Shih, H. C. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE LETTERS ; 21 ; 1709-1711

Publication date:

2002-01-01

Size:

3 pages

ISSN:

0261-8028

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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