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Pulsed TEA CO2 laser surface modifications of silicon

Trtica, M. S. / Gakovic, B. M.

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Pulsed TEA CO2 laser surface modifications of silicon

Trtica, M. S. / Gakovic, B. M.

Pulsed TEA CO2 laser surface modifications of silicon

Trtica, M. S. / Gakovic, B. M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Pulsed TEA CO2 laser surface modifications of silicon

Contributors:

Trtica, M. S. (author) / Gakovic, B. M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 205 ; 336-342

Publication date:

2003-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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