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On the correlation between Si+ yields and surface oxygen concentration using in situ SIMS-LEIS
On the correlation between Si+ yields and surface oxygen concentration using in situ SIMS-LEIS
On the correlation between Si+ yields and surface oxygen concentration using in situ SIMS-LEIS
Janssens, T. (author) / Huyghebaert, C. (author) / Vandervorst, W. (author) / Gildenpfennig, A. (author) / Brongersma, H. H. (author)
APPLIED SURFACE SCIENCE ; 203-204 ; 30-34
2003-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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