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Ti3SiC2 formed in annealed Al/Ti contacts to p-type SiC

Pecz, B. / Toth, L. / di Forte-Poisson, M. A. / Vacas, J.

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Ti3SiC2 formed in annealed Al/Ti contacts to p-type SiC

Pecz, B. / Toth, L. / di Forte-Poisson, M. A. / Vacas, J.

Ti3SiC2 formed in annealed Al/Ti contacts to p-type SiC

Pecz, B. / Toth, L. / di Forte-Poisson, M. A. / Vacas, J.

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Document information

Title:

Ti3SiC2 formed in annealed Al/Ti contacts to p-type SiC

Contributors:

Pecz, B. (author) / Toth, L. (author) / di Forte-Poisson, M. A. (author) / Vacas, J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 206 ; 8-11

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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