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    Interference microscopy for nanometric surface microstructure analysis in excimer laser processing of silicon for flat panel displays

    New search for: Benatmane, A.
    New search for: Montgomery, P. C.
    New search for: Fogarassy, E.
    New search for: Zahorski, D.

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    Interference microscopy for nanometric surface microstructure analysis in excimer laser processing of silicon for flat panel displays

    New search for: Benatmane, A.
    New search for: Montgomery, P. C.
    New search for: Fogarassy, E.
    New search for: Zahorski, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Interference microscopy for nanometric surface microstructure analysis in excimer laser processing of silicon for flat panel displays

    New search for: Benatmane, A.
    New search for: Montgomery, P. C.
    New search for: Fogarassy, E.
    New search for: Zahorski, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    Interference microscopy for nanometric surface microstructure analysis in excimer laser processing of silicon for flat panel displays

    Contributors:

    Benatmane, A. (author) / Montgomery, P. C. (author) / Fogarassy, E. (author) / Zahorski, D. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 208/209 ; 189-193

    Publication date:

    2003-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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