Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Etching of fused silica and glass with excimer laser at 351 nm

    New search for: Zimmer, K.
    New search for: Braun, A.
    New search for: Bohme, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Etching of fused silica and glass with excimer laser at 351 nm

    New search for: Zimmer, K.
    New search for: Braun, A.
    New search for: Bohme, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Etching of fused silica and glass with excimer laser at 351 nm

    New search for: Zimmer, K.
    New search for: Braun, A.
    New search for: Bohme, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Etching of fused silica and glass with excimer laser at 351 nm

    Contributors:

    Zimmer, K. (author) / Braun, A. (author) / Bohme, R. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 208/209 ; 199-204

    Publication date:

    2003-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Laser-induced front side etching of fused silica with XeF excimer laser using thin metal layers

    Lorenz, P. / Ehrhardt, M. / Wehrmann, A. et al. | British Library Online Contents | 2012

    Excimer Laser Etching

    Boatner, L. / Longmire, H. / Rouleau, C. et al. | British Library Online Contents | 2008

    Backside etching of fused silica with Nd:YAG laser

    Zimmer, K. / Bohme, R. / Pissadakis, S. et al. | British Library Online Contents | 2006

    Deep Wet Etching Uniformity of Polished Fused Silica Glass

    Du, X. R. / Song, X. F. / Sun, Y. C. et al. | British Library Conference Proceedings | 2017

    Indirect laser etching of fused silica: Towards high etching rate processing

    Bohme, R. / Zimmer, K. | British Library Online Contents | 2007

    Back to top