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Pulsed laser deposition of diamond-like carbon films: reducing internal stress by thermal annealing
Pulsed laser deposition of diamond-like carbon films: reducing internal stress by thermal annealing
Pulsed laser deposition of diamond-like carbon films: reducing internal stress by thermal annealing
Mosaner, P. (author) / Bonelli, M. (author) / Miotello, A. (author)
APPLIED SURFACE SCIENCE ; 208/209 ; 561-565
2003-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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