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Wet oxidation kinetics of AIAs at elevated temperatures

Ko, S.-C. / Lee, S. / Wang, H.-L. / Chou, Y. T.

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Wet oxidation kinetics of AIAs at elevated temperatures

Ko, S.-C. / Lee, S. / Wang, H.-L. / Chou, Y. T.

Wet oxidation kinetics of AIAs at elevated temperatures

Ko, S.-C. / Lee, S. / Wang, H.-L. / Chou, Y. T.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Wet oxidation kinetics of AIAs at elevated temperatures

Contributors:

Ko, S.-C. (author) / Lee, S. (author) / Wang, H.-L. (author) / Chou, Y. T. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 18 ; 1027-1030

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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