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    Effect of annealing in processing of strontium titanate thin films by ALD

    New search for: Kosola, A.
    New search for: Putkonen, M.
    New search for: Johansson, L. S.
    New search for: Niinisto, L.

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    Effect of annealing in processing of strontium titanate thin films by ALD

    New search for: Kosola, A.
    New search for: Putkonen, M.
    New search for: Johansson, L. S.
    New search for: Niinisto, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of annealing in processing of strontium titanate thin films by ALD

    New search for: Kosola, A.
    New search for: Putkonen, M.
    New search for: Johansson, L. S.
    New search for: Niinisto, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Effect of annealing in processing of strontium titanate thin films by ALD

    Contributors:

    Kosola, A. (author) / Putkonen, M. (author) / Johansson, L. S. (author) / Niinisto, L. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 211 ; 102-112

    Publication date:

    2003-01-01

    Size:

    11 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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