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Effect of deposition inhomogeneity on the Ohm resistance of thin electroless copper layers

Radoeva, M. / Radoev, B. / Stockelhuber, K. W.

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Effect of deposition inhomogeneity on the Ohm resistance of thin electroless copper layers

Radoeva, M. / Radoev, B. / Stockelhuber, K. W.

Effect of deposition inhomogeneity on the Ohm resistance of thin electroless copper layers

Radoeva, M. / Radoev, B. / Stockelhuber, K. W.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Effect of deposition inhomogeneity on the Ohm resistance of thin electroless copper layers

Contributors:

Radoeva, M. (author) / Radoev, B. (author) / Stockelhuber, K. W. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 38 ; 2703-2707

Publication date:

2003-01-01

Size:

5 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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