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Laser lift-off of very thin AlGaN film from sapphire using selective decomposition of GaN interlayer
Laser lift-off of very thin AlGaN film from sapphire using selective decomposition of GaN interlayer
Laser lift-off of very thin AlGaN film from sapphire using selective decomposition of GaN interlayer
Ueda, T. (author) / Ishida, M. (author) / Yuri, M. (author)
APPLIED SURFACE SCIENCE ; 216 ; 512-518
2003-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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