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    Investigation of Si nanocluster formation in sputter-deposited silicon sub-oxides for nanocluster memory structures

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    Investigation of Si nanocluster formation in sputter-deposited silicon sub-oxides for nanocluster memory structures

    New search for: Schmidt, J. U.
    New search for: Schmidt, B.

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    Investigation of Si nanocluster formation in sputter-deposited silicon sub-oxides for nanocluster memory structures

    New search for: Schmidt, J. U.
    New search for: Schmidt, B.

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    Access via TIB
    Check availability in my library
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    Document information
    Title:

    Investigation of Si nanocluster formation in sputter-deposited silicon sub-oxides for nanocluster memory structures

    Contributors:

    Schmidt, J. U. (author) / Schmidt, B. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 101 ; 28-33

    Publication date:

    2003-01-01

    Size:

    6 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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