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Diffusion of Sr, Bi, and Ta in amorphous SiO2
Diffusion of Sr, Bi, and Ta in amorphous SiO2
Diffusion of Sr, Bi, and Ta in amorphous SiO2
Bungener, R. (author) / Pamler, W. (author) / Gosele, U. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 6 ; 43-48
2003-01-01
6 pages
Article (Journal)
English
DDC:
621.38152
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