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Crystallographic cracking behavior in silicon single crystal wafer

Tan, J. / Li, S. X. / Wan, Y. / Li, F. / Lu, K.

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Crystallographic cracking behavior in silicon single crystal wafer

Tan, J. / Li, S. X. / Wan, Y. / Li, F. / Lu, K.

Crystallographic cracking behavior in silicon single crystal wafer

Tan, J. / Li, S. X. / Wan, Y. / Li, F. / Lu, K.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Crystallographic cracking behavior in silicon single crystal wafer

Contributors:

Tan, J. (author) / Li, S. X. (author) / Wan, Y. (author) / Li, F. (author) / Lu, K. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 103 ; 49-56

Publication date:

2003-01-01

Size:

8 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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