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Surface Structure of Electrochemically Etched alpha-SiC Substrates
Surface Structure of Electrochemically Etched alpha-SiC Substrates
Surface Structure of Electrochemically Etched alpha-SiC Substrates
Mikami, H. (author) / Umetani, A. (author) / Hatayama, T. (author) / Yano, H. (author) / Uraoka, Y. (author) / Fuyuki, T. (author) / Bergman, P. / Janzen, E.
2003-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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