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Raman measurement of stress distribution in multicrystalline silicon materials

Kouteva-Arguirova, S. / Seifert, W. / Kittler, M. / Reif, J.

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Raman measurement of stress distribution in multicrystalline silicon materials

Kouteva-Arguirova, S. / Seifert, W. / Kittler, M. / Reif, J.

Raman measurement of stress distribution in multicrystalline silicon materials

Kouteva-Arguirova, S. / Seifert, W. / Kittler, M. / Reif, J.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Raman measurement of stress distribution in multicrystalline silicon materials

Contributors:

Kouteva-Arguirova, S. (author) / Seifert, W. (author) / Kittler, M. (author) / Reif, J. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 102 ; 37-42

Publication date:

2003-01-01

Size:

6 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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