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Formation of nanometer-scale gaps between metallic electrodes using pulse/DC plating and photolithography

Lee, Y. / Jo, Y. S. / Roh, Y.

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Formation of nanometer-scale gaps between metallic electrodes using pulse/DC plating and photolithography

Lee, Y. / Jo, Y. S. / Roh, Y.

Formation of nanometer-scale gaps between metallic electrodes using pulse/DC plating and photolithography

Lee, Y. / Jo, Y. S. / Roh, Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Formation of nanometer-scale gaps between metallic electrodes using pulse/DC plating and photolithography

Contributors:

Lee, Y. (author) / Jo, Y. S. (author) / Roh, Y. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -AMSTERDAM THEN LAUSANNE- C ; 23 ; 833-839

Publication date:

2003-01-01

Size:

7 pages

ISSN:

0928-4931

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 660

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