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Fabrication of nanostructures using scanning probe microscope lithography

Lee, S. / Kim, J. / Shin, W. S. / Lee, H. J. / Koo, S. / Lee, H.

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Fabrication of nanostructures using scanning probe microscope lithography

Lee, S. / Kim, J. / Shin, W. S. / Lee, H. J. / Koo, S. / Lee, H.

Fabrication of nanostructures using scanning probe microscope lithography

Lee, S. / Kim, J. / Shin, W. S. / Lee, H. J. / Koo, S. / Lee, H.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Fabrication of nanostructures using scanning probe microscope lithography

Contributors:

Lee, S. (author) / Kim, J. (author) / Shin, W. S. (author) / Lee, H. J. (author) / Koo, S. (author) / Lee, H. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -AMSTERDAM THEN LAUSANNE- C ; 24 ; 3-9

Publication date:

2004-01-01

Size:

7 pages

ISSN:

0928-4931

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 660

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