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    Enhanced crystal nucleation in a-SiGe/SiO2 by ion-irradiation assisted annealing

    New search for: Tsunoda, I.
    New search for: Kenjo, A.
    New search for: Sadoh, T.
    New search for: Miyao, M.

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    Enhanced crystal nucleation in a-SiGe/SiO2 by ion-irradiation assisted annealing

    New search for: Tsunoda, I.
    New search for: Kenjo, A.
    New search for: Sadoh, T.
    New search for: Miyao, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Enhanced crystal nucleation in a-SiGe/SiO2 by ion-irradiation assisted annealing

    New search for: Tsunoda, I.
    New search for: Kenjo, A.
    New search for: Sadoh, T.
    New search for: Miyao, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Enhanced crystal nucleation in a-SiGe/SiO2 by ion-irradiation assisted annealing

    Contributors:

    Tsunoda, I. (author) / Kenjo, A. (author) / Sadoh, T. (author) / Miyao, M. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 224 ; 231-234

    Publication date:

    2004-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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