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Science and prospects for non-stoichiometry in dielectrics

Pei, Z. / Hwang, H. L.

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Science and prospects for non-stoichiometry in dielectrics

Pei, Z. / Hwang, H. L.

Science and prospects for non-stoichiometry in dielectrics

Pei, Z. / Hwang, H. L.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Science and prospects for non-stoichiometry in dielectrics

Contributors:

Pei, Z. (author) / Hwang, H. L. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 6 ; 339-342

Publication date:

2003-01-01

Size:

4 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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