Direct Growth of SiC Nanorods on Si Using APCVD and Single Precursors: Fid-Bau Portal

Direct Growth of SiC Nanorods on Si Using APCVD and Single Precursors

Rho, D. / Kim, J. S. / Byun, D. J. / Yang, J. W. / Jhin, J. G. / Kim, N. R.

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Direct Growth of SiC Nanorods on Si Using APCVD and Single Precursors

Rho, D. / Kim, J. S. / Byun, D. J. / Yang, J. W. / Jhin, J. G. / Kim, N. R.

Direct Growth of SiC Nanorods on Si Using APCVD and Single Precursors

Rho, D. / Kim, J. S. / Byun, D. J. / Yang, J. W. / Jhin, J. G. / Kim, N. R.

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Document information

Title:

Direct Growth of SiC Nanorods on Si Using APCVD and Single Precursors

Contributors:

Rho, D. (author) / Kim, J. S. (author) / Byun, D. J. (author) / Yang, J. W. (author) / Jhin, J. G. (author) / Kim, N. R. (author) / Kang, S.-G. / Kobayashi, T.

Published in:

Designing, Processing and Properties of Advanced Engineering Materials PART 2 ; 701-704

MATERIALS SCIENCE FORUM ; 449/452

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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