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Development of novel process for Ru CMP using ceric ammonium nitrate (CAN)-containing nitric acid

Lee, W. J. / Park, H. S.

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Development of novel process for Ru CMP using ceric ammonium nitrate (CAN)-containing nitric acid

Lee, W. J. / Park, H. S.

Development of novel process for Ru CMP using ceric ammonium nitrate (CAN)-containing nitric acid

Lee, W. J. / Park, H. S.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Development of novel process for Ru CMP using ceric ammonium nitrate (CAN)-containing nitric acid

Contributors:

Lee, W. J. (author) / Park, H. S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 228 ; 410-417

Publication date:

2004-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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