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    Y2O3 thin films: internal stress and microstructure

    New search for: Gaboriaud, R. J.
    New search for: Paumier, F.
    New search for: Pailloux, F.
    New search for: Guerin, P.

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    Y2O3 thin films: internal stress and microstructure

    New search for: Gaboriaud, R. J.
    New search for: Paumier, F.
    New search for: Pailloux, F.
    New search for: Guerin, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Y2O3 thin films: internal stress and microstructure

    New search for: Gaboriaud, R. J.
    New search for: Paumier, F.
    New search for: Pailloux, F.
    New search for: Guerin, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
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    Document information
    Title:

    Y2O3 thin films: internal stress and microstructure

    Contributors:

    Gaboriaud, R. J. (author) / Paumier, F. (author) / Pailloux, F. (author) / Guerin, P. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 109 ; 34-38

    Publication date:

    2004-01-01

    Size:

    5 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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