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Young's modulus of electroplated Ni thin film for MEMS applications

Luo, J. K. / Flewitt, A. J. / Spearing, S. M. / Fleck, N. A. / Milne, W. I.

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Young's modulus of electroplated Ni thin film for MEMS applications

Luo, J. K. / Flewitt, A. J. / Spearing, S. M. / Fleck, N. A. / Milne, W. I.

Young's modulus of electroplated Ni thin film for MEMS applications

Luo, J. K. / Flewitt, A. J. / Spearing, S. M. / Fleck, N. A. / Milne, W. I.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Young's modulus of electroplated Ni thin film for MEMS applications

Contributors:

Luo, J. K. (author) / Flewitt, A. J. (author) / Spearing, S. M. (author) / Fleck, N. A. (author) / Milne, W. I. (author)

Published in:

MATERIALS LETTERS ; 58 ; 2306-2309

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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