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    Formation of PZT Thin Films on 6-Inch Wafers by Liquid Delivery Metalorganic Chemical Vapor Deposition (INVITED)

    New search for: Otani, Y.
    New search for: Okamura, S.
    New search for: Shiosaki, T.
    New search for: Mandal, H.
    New search for: Ovecoglu, L.

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    Formation of PZT Thin Films on 6-Inch Wafers by Liquid Delivery Metalorganic Chemical Vapor Deposition (INVITED)

    New search for: Otani, Y.
    New search for: Okamura, S.
    New search for: Shiosaki, T.
    New search for: Mandal, H.
    New search for: Ovecoglu, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Formation of PZT Thin Films on 6-Inch Wafers by Liquid Delivery Metalorganic Chemical Vapor Deposition (INVITED)

    New search for: Otani, Y.
    New search for: Okamura, S.
    New search for: Shiosaki, T.
    New search for: Mandal, H.
    New search for: Ovecoglu, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Formation of PZT Thin Films on 6-Inch Wafers by Liquid Delivery Metalorganic Chemical Vapor Deposition (INVITED)

    Contributors:

    Otani, Y. (author) / Okamura, S. (author) / Shiosaki, T. (author) / Mandal, H. / Ovecoglu, L.

    Published in:

    Euro Ceramics VIII Part 1 Proceedings of the 8^t^h Conference and Exhibition of the European Ceramic Society Istanbul, Turkey, June 29 - July 3, 2003 ; 459-464

    KEY ENGINEERING MATERIALS. ; 264/268

    Publication date:

    2004-01-01

    Size:

    6 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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