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    Enabling technologies for MEMS and nanodevices

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    Enabling technologies for MEMS and nanodevices

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    Enabling technologies for MEMS and nanodevices

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    Title:

    Enabling technologies for MEMS and nanodevices

    Published in:

    MATERIALS TODAY -OXFORD THEN KIDLINGTON- ; 7 ; 55

    Publication date:

    2004-01-01

    Size:

    55 pages

    ISSN:

    1369-7021

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11299

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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