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High-resolution photoemission electron spectroscopy study on the oxynitridation of 6H-SiC(0001)-3x3R30degree surface
High-resolution photoemission electron spectroscopy study on the oxynitridation of 6H-SiC(0001)-3x3R30degree surface
High-resolution photoemission electron spectroscopy study on the oxynitridation of 6H-SiC(0001)-3x3R30degree surface
Labis, J. (author) / Oh, J. (author) / Namatame, H. (author) / Taniguchi, M. (author) / Hirai, M. (author) / Kusaka, M. (author) / Iwami, M. (author)
APPLIED SURFACE SCIENCE ; 237 ; 170-175
2004-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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