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Evaluation of elastic modulus and hardness of thin films by nanoindentation
Evaluation of elastic modulus and hardness of thin films by nanoindentation
Evaluation of elastic modulus and hardness of thin films by nanoindentation
Jung, Y.-G. (author) / Lawn, B. R. (author) / Martyniuk, M. (author) / Huang, H. (author) / Hu, X. Z. (author)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 19 ; 3076-3080
2004-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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