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    Metalorganic chemical vapor deposition of silver thin films for future interconnects by direct liquid injection system

    New search for: Gao, L.
    New search for: Harter, P.
    New search for: Linsmeier, C.
    New search for: Gstottner, J.
    New search for: Emling, R.
    New search for: Schmitt-Landsiedel, D.

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    Metalorganic chemical vapor deposition of silver thin films for future interconnects by direct liquid injection system

    New search for: Gao, L.
    New search for: Harter, P.
    New search for: Linsmeier, C.
    New search for: Gstottner, J.
    New search for: Emling, R.
    New search for: Schmitt-Landsiedel, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Metalorganic chemical vapor deposition of silver thin films for future interconnects by direct liquid injection system

    New search for: Gao, L.
    New search for: Harter, P.
    New search for: Linsmeier, C.
    New search for: Gstottner, J.
    New search for: Emling, R.
    New search for: Schmitt-Landsiedel, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Metalorganic chemical vapor deposition of silver thin films for future interconnects by direct liquid injection system

    Contributors:

    Gao, L. (author) / Harter, P. (author) / Linsmeier, C. (author) / Gstottner, J. (author) / Emling, R. (author) / Schmitt-Landsiedel, D. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 7 ; 331-335

    Publication date:

    2004-01-01

    Size:

    5 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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