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Determination of Silicon self-interstitial diffusivity using isotopically pure 30Silicon multi-layer

Seto, S. / Sakaguchi, T. / Nakabayashi, Y. / Matsumoto, S. / Murota, J. / Wada, K. / Abe, T.

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Determination of Silicon self-interstitial diffusivity using isotopically pure 30Silicon multi-layer

Seto, S. / Sakaguchi, T. / Nakabayashi, Y. / Matsumoto, S. / Murota, J. / Wada, K. / Abe, T.

Determination of Silicon self-interstitial diffusivity using isotopically pure 30Silicon multi-layer

Seto, S. / Sakaguchi, T. / Nakabayashi, Y. / Matsumoto, S. / Murota, J. / Wada, K. / Abe, T.

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Document information

Title:

Determination of Silicon self-interstitial diffusivity using isotopically pure 30Silicon multi-layer

Contributors:

Seto, S. (author) / Sakaguchi, T. (author) / Nakabayashi, Y. (author) / Matsumoto, S. (author) / Murota, J. (author) / Wada, K. (author) / Abe, T. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 114/115 ; 334-338

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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