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Effect of sputtering input powers on CoSi2 thin films prepared by magnetron sputtering

Cheng, F. X. / Jiang, C. H. / Wu, J. S.

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Effect of sputtering input powers on CoSi2 thin films prepared by magnetron sputtering

Cheng, F. X. / Jiang, C. H. / Wu, J. S.

Effect of sputtering input powers on CoSi2 thin films prepared by magnetron sputtering

Cheng, F. X. / Jiang, C. H. / Wu, J. S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Effect of sputtering input powers on CoSi2 thin films prepared by magnetron sputtering

Contributors:

Cheng, F. X. (author) / Jiang, C. H. (author) / Wu, J. S. (author)

Published in:

MATERIALS AND DESIGN -REIGATE- ; 26 ; 369-372

Publication date:

2005-01-01

Size:

4 pages

ISSN:

0261-3069

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.0042

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Effect of sputtering input powers on CoSi2 thin films prepared by magnetron sputtering

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