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Surface morphology anisotropy and stress distribution uniformity in annealed Cu-W films
Surface morphology anisotropy and stress distribution uniformity in annealed Cu-W films
Surface morphology anisotropy and stress distribution uniformity in annealed Cu-W films
Wang, Y. (author) / Li, X.-H. (author) / Chen, Y.-H. (author) / Xu, K.-W. (author) / Fan, D. W. (author)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 20 ; 151-160
2005-01-01
10 pages
Article (Journal)
English
DDC:
620.11
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