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Characterization of sputter deposited W–Si–N coatings based on α-W structure

Fu, T. / Zhou, Z. F. / Li, K. Y. / Shen, Y. G.

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Characterization of sputter deposited W–Si–N coatings based on α-W structure

Fu, T. / Zhou, Z. F. / Li, K. Y. / Shen, Y. G.

Characterization of sputter deposited W–Si–N coatings based on α-W structure

Fu, T. / Zhou, Z. F. / Li, K. Y. / Shen, Y. G.

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Document information

Title:

Characterization of sputter deposited W–Si–N coatings based on α-W structure

Contributors:

Fu, T. (author) / Zhou, Z. F. (author) / Li, K. Y. (author) / Shen, Y. G. (author)

Published in:

MATERIALS LETTERS ; 59 ; 618-623

Publication date:

2005-01-01

Size:

6 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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