Indirect laser etching of fused silica: Towards high etching rate processing

Bohme, R. / Zimmer, K. | British Library Online Contents | 2007

Backside etching of fused silica with Nd:YAG laser

Zimmer, K. / Bohme, R. / Pissadakis, S. et al. | British Library Online Contents | 2006

Deep Wet Etching Uniformity of Polished Fused Silica Glass

Du, X. R. / Song, X. F. / Sun, Y. C. et al. | British Library Conference Proceedings | 2017

Etching of fused silica fiber by metallic laser-induced backside wet etching technique

Vass, C. / Kiss, B. / Kopniczky, J. et al. | British Library Online Contents | 2013

Time-resolved measurements during backside dry etching of fused silica

Zimmer, K. / Bohme, R. / Vass, C. et al. | British Library Online Contents | 2009