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4H-SiC Epitaxial Growth on SiC Substrates with Various Off-Angles
4H-SiC Epitaxial Growth on SiC Substrates with Various Off-Angles
4H-SiC Epitaxial Growth on SiC Substrates with Various Off-Angles
Saitoh, H. (author) / Kimoto, T. (author) / Nipoti, R. / Poggi, A. / Scorzoni, A.
2005-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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