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Recent developments in the MOCVD and ALD of rare earth oxides and silicates
Recent developments in the MOCVD and ALD of rare earth oxides and silicates
Recent developments in the MOCVD and ALD of rare earth oxides and silicates
Jones, A. C. (author) / Aspinall, H. C. (author) / Chalker, P. R. (author) / Potter, R. J. (author) / Kukli, K. (author) / Rahtu, A. (author) / Ritala, M. (author) / Leskela, M. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 118 ; 97-104
2005-01-01
8 pages
Article (Journal)
English
DDC:
620.11
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