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Interface Passivation for Silicon Dioxide Layers on Silicon Carbide

Dhar, S. / Wang, S. / Williams, J. R. / Pantelides, S. T. / Feldman, L. C.

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Interface Passivation for Silicon Dioxide Layers on Silicon Carbide

Dhar, S. / Wang, S. / Williams, J. R. / Pantelides, S. T. / Feldman, L. C.

Interface Passivation for Silicon Dioxide Layers on Silicon Carbide

Dhar, S. / Wang, S. / Williams, J. R. / Pantelides, S. T. / Feldman, L. C.

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Check availability in my library

Order at Subito €

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Document information

Title:

Interface Passivation for Silicon Dioxide Layers on Silicon Carbide

Contributors:

Dhar, S. (author) / Wang, S. (author) / Williams, J. R. (author) / Pantelides, S. T. (author) / Feldman, L. C. (author)

Published in:

MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 30 ; 288-292

Publication date:

2005-01-01

Size:

5 pages

ISSN:

0883-7694

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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