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    Direct Nanoimprinting of Si Single Crystals Using SiC Molds for Ordered Anodic Tunnel Etching

    New search for: Nishio, K.
    New search for: Yasui, K.
    New search for: Matsumoto, F.
    New search for: Kanezawa, K.
    New search for: Masuda, H.

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    Direct Nanoimprinting of Si Single Crystals Using SiC Molds for Ordered Anodic Tunnel Etching

    New search for: Nishio, K.
    New search for: Yasui, K.
    New search for: Matsumoto, F.
    New search for: Kanezawa, K.
    New search for: Masuda, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Direct Nanoimprinting of Si Single Crystals Using SiC Molds for Ordered Anodic Tunnel Etching

    New search for: Nishio, K.
    New search for: Yasui, K.
    New search for: Matsumoto, F.
    New search for: Kanezawa, K.
    New search for: Masuda, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Direct Nanoimprinting of Si Single Crystals Using SiC Molds for Ordered Anodic Tunnel Etching

    Contributors:

    Nishio, K. (author) / Yasui, K. (author) / Matsumoto, F. (author) / Kanezawa, K. (author) / Masuda, H. (author)

    Published in:

    ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 17 ; 1293-1295

    Publication date:

    2005-01-01

    Size:

    3 pages

    ISSN:

    0935-9648

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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