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    Effect of Carbon and Nitrogen Implantation on the Properties of Silicon Nitrides

    New search for: Arato, P.
    New search for: Balazsi, C.
    New search for: Kover, Z.
    New search for: Weber, F.
    New search for: Richter, E.
    New search for: Gyulai, J.
    New search for: Dusza, J.
    New search for: Danzer, R.
    New search for: Morrell, R.

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    Effect of Carbon and Nitrogen Implantation on the Properties of Silicon Nitrides

    New search for: Arato, P.
    New search for: Balazsi, C.
    New search for: Kover, Z.
    New search for: Weber, F.
    New search for: Richter, E.
    New search for: Gyulai, J.
    New search for: Dusza, J.
    New search for: Danzer, R.
    New search for: Morrell, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of Carbon and Nitrogen Implantation on the Properties of Silicon Nitrides

    New search for: Arato, P.
    New search for: Balazsi, C.
    New search for: Kover, Z.
    New search for: Weber, F.
    New search for: Richter, E.
    New search for: Gyulai, J.
    New search for: Dusza, J.
    New search for: Danzer, R.
    New search for: Morrell, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Effect of Carbon and Nitrogen Implantation on the Properties of Silicon Nitrides

    Contributors:

    Arato, P. (author) / Balazsi, C. (author) / Kover, Z. (author) / Weber, F. (author) / Richter, E. (author) / Gyulai, J. (author) / Dusza, J. / Danzer, R. / Morrell, R.

    Published in:

    Fractography of Advanced Ceramics II ; 160-166

    KEY ENGINEERING MATERIALS ; 290

    Publication date:

    2005-01-01

    Size:

    7 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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