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    Current trends in 157nm dry lithography

    New search for: Cefalas, A. C.

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    Current trends in 157nm dry lithography

    New search for: Cefalas, A. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Current trends in 157nm dry lithography

    New search for: Cefalas, A. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    Current trends in 157nm dry lithography

    Contributors:

    Cefalas, A. C. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 247 ; 577-583

    Publication date:

    2005-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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