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    The Use of Functionally Graded Poly-SiGe Layers for MEMS Applications

    New search for: Witvrouw, A.
    New search for: Mehta, A.

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    The Use of Functionally Graded Poly-SiGe Layers for MEMS Applications

    New search for: Witvrouw, A.
    New search for: Mehta, A.

    Access

    Access via TIB
    Check availability in my library
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    The Use of Functionally Graded Poly-SiGe Layers for MEMS Applications

    New search for: Witvrouw, A.
    New search for: Mehta, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Title:

    The Use of Functionally Graded Poly-SiGe Layers for MEMS Applications

    Contributors:

    Witvrouw, A. (author) / Mehta, A. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 492/493 ; 255-260

    Publication date:

    2005-01-01

    Size:

    6 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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