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Laser Scattering Measurement of Microdefects on Silicon Oxide Wafer

Ha, T. / Miyoshi, T. / Takaya, Y. / Takahashi, S.

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Laser Scattering Measurement of Microdefects on Silicon Oxide Wafer

Ha, T. / Miyoshi, T. / Takaya, Y. / Takahashi, S.

Laser Scattering Measurement of Microdefects on Silicon Oxide Wafer

Ha, T. / Miyoshi, T. / Takaya, Y. / Takahashi, S.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Laser Scattering Measurement of Microdefects on Silicon Oxide Wafer

Contributors:

Ha, T. (author) / Miyoshi, T. (author) / Takaya, Y. (author) / Takahashi, S. (author) / Gao, Y. / Tse, S. / Gao, W.

Published in:

Measurement Technology and Intelligent Instruments VI ; 3-8

KEY ENGINEERING MATERIALS ; 295/296

Publication date:

2005-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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